AME-TL1200 Metal Organic Chemical Vapor Deposition(MOCVD)

MOCVD is the 1 new vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth (VPE).

MOCVD uses organic compounds of group III and II elements and hydrides of group V and VI elements as growth source materials to carry out vapor phase epitaxy on the substrate by thermal decomposition reaction to grow various III-V main group, II-VI sub-group compound semiconductors and thin-layer two-dimensional materials.

Model

AME-TL1200

Power

17KW

Power supply voltage

Three-phase 380V 50Hz air-open 4P C50A cable 5-core 6-square

Furnace tube size

High purity quartz tube 100 × 60+250 × 1000mm (variable diameter quartz tube)

Overall dimension

1700 × 600 × 850mm

Temperature range

0-1200

Rated temperature

1150

Heating the original

Resistance wire

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