MOCVD is the 1 new vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth (VPE).
MOCVD uses organic compounds of group III and II elements and hydrides of group V and VI elements as growth source materials to carry out vapor phase epitaxy on the substrate by thermal decomposition reaction to grow various III-V main group, II-VI sub-group compound semiconductors and thin-layer two-dimensional materials.
Model |
AME-TL1200 |
Power |
17KW |
Power supply voltage |
Three-phase 380V 50Hz air-open 4P C50A cable 5-core 6-square |
Furnace tube size |
High purity quartz tube 100 × 60+250 × 1000mm (variable diameter quartz tube) |
Overall dimension |
1700 × 600 × 850mm |
Temperature range |
0-1200 ℃ |
Rated temperature |
1150 ℃ |
Heating the original |
Resistance wire |