5L plasma cleaner is a compact, non-destructive cleaning device. The plasma cleaner uses low air pressure to excite plasma as a cleaning medium, thereby effectively avoiding secondary pollution caused by the liquid cleaning medium to the object to be cleaned. The device is equipped with a mechanical vacuum pump, while vacuuming maintains the vacuum of the chamber, the pollutants after the plasma reaction can also be pumped away by the vacuum pump; therefore, the short-time cleaning can completely clean the organic pollutants.
In addition to the cleaning function, this small plasma cleaner can change the surface properties of some materials according to the needs under certain conditions. During the cleaning process, the glow discharge of the small plasma cleaner not only enhances the adhesion, compatibility and wettability of these materials, but also disinfects and sterilizes the materials.
Main parts |
Item |
Parameters |
Cleaning the chamber |
Chamber material |
High purity quartz |
Chamber size |
Diameter 200 mm; Length 170 mm |
|
RF power supply |
Power supply features |
The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products. |
Power advantage |
Long time normal operation Simple and flexible operation High power supply efficiency and low heat generation With perfect reflection power protection function |
|
RF power |
0~500W continuously adjustable/0~1000W continuously adjustable |
|
Signal frequency |
13.56MHz ±0.005% |
|
Reflected power |
≤200W |
|
Power stability |
±0.1% |
|
RF connector |
N type connector |
|
Machine efficiency |
≥75% |
|
Harmonic component |
≤-50 dBc |
|
cooling method |
Forced air cooling |
|
Gas measurement |
Measuring unit |
Float flowmeter |
Gas channel |
Two channels |
|
A channel range |
10~100ml |
|
B channel range |
16~160ml |
|
Vacuum |
Vacuum measurement |
Digital vacuum gauge (resistance gauge) |
Vacuum pump |
Two-stage rotary vane vacuum pump |
|
Motor speed |
50 Hz: 1440; 60 Hz: 1720 |
|
Pumping rate |
50 Hz: 1.1L/s; 60 Hz: 1.3L/s |
|
Vacuum range |
0.1Pa~10000Pa |
|
Ultimate vacuum |
0.5Pa |
|
Motor noise |
≤56dB |
|
Pipe interface |
Gas inlet: KF16; exhaust port KF16. |
|
Connecting pipe |
KF16 vacuum bellows |
|
Vacuum valve |
Solenoid valve |
|
Motor Power |
400W |
|
Other |
Power supply |
AC220V 50/60Hz |
Total power |
1000W/1500W |
|
Operating temperature |
-10℃- 40℃ |
|
Working vacuum |
≤40Pa |
|
Overall size |
600mm×650mm×730mm |
|
Total Weight |
80kg (including packaging) |